HG-SC-101 · Semiconductor
Vacuum Chamber Block
A6061-T6 · ±0.01 mm · 1 – 200 pcs
HG-SC-101
Vacuum Chamber Block
Process chamber body for etch and deposition tools. Large aluminum billets are machined in one 5-axis setup and shipped helium leak-tested.
- Material
- A6061-T6
- Tolerance
- ±0.01 mm
- Lead time
- 3 – 4 weeks
- Single-setup 5-axis machining keeps port true position within 0.02 mm
- Leak rate verified below 1×10⁻⁹ mbar·L/s
- CMM report against customer drawing included
[SPEC] Specifications
Specifications
Values reflect a representative delivered job. Processes are re-engineered to each customer drawing.
| Part code | HG-SC-101 |
|---|---|
| Industry | Semiconductor |
| Material | A6061-T6 |
| Tolerance | ±0.01 mm |
| Geometric / surface | Flatness 0.005 mm / O-ring groove Ra 0.4 |
| Size range | Up to 820 × 640 × 300 mm |
| Finish | Hard anodizing (Type III) / electroless nickel |
| Order quantity | 1 – 200 pcs |
| Standard lead time | 3 – 4 weeks |
| Documents | CMM report, mill certificate, coating certificate |
Process flow
- Sawing & roughing
- Stress relief
- 5-axis finishing
- CMM inspection
- Helium leak test
- Clean wash & pack
Related parts
All productsSemiconductor
HG-SC-102
Gas Manifold Block
SUS316L manifold for process gas distribution. Intersecting deep holes, in…
- Material
- STS316L (VIM-VAR available)
- Tolerance
- ±0.01 mm
- Lead time
- 3 weeks
Semiconductor
HG-SC-103
Wafer Handling End Effector
End effector for 300 mm wafer transfer robots. Thin, long geometry is stab…
- Material
- ESD PEEK / A6061-T6
- Tolerance
- ±0.02 mm
- Lead time
- 2 – 3 weeks
Secondary Battery
HG-BT-201
Battery Cell Stacking Jig
Alignment jig for pouch cell stacking machines. High-strength A7075 with h…
- Material
- A7075-T651
- Tolerance
- ±0.01 mm
- Lead time
- 2 weeks
Send us a drawing.
We reply within 24 hours.
PDF, STEP, DWG or IGES. From a single prototype to monthly production volumes.