HG-SC-102 · Semiconductor
Gas Manifold Block
STS316L (VIM-VAR available) · ±0.01 mm · 5 – 500 pcs
HG-SC-102
Gas Manifold Block
SUS316L manifold for process gas distribution. Intersecting deep holes, internal deburring and electropolishing are all done in-house.
- Material
- STS316L
- Tolerance
- ±0.01 mm
- Lead time
- 3 weeks
- Deep holes up to L/D 30
- Borescope records for every intersection
- Class 100 clean packaging option
[SPEC] Specifications
Specifications
Values reflect a representative delivered job. Processes are re-engineered to each customer drawing.
| Part code | HG-SC-102 |
|---|---|
| Industry | Semiconductor |
| Material | STS316L (VIM-VAR available) |
| Tolerance | ±0.01 mm |
| Geometric / surface | Bore intersection ±0.02 mm / internal Ra 0.25 μm |
| Size range | 150 × 80 × 60 – 400 × 200 × 120 mm |
| Finish | Electropolishing (EP), passivation |
| Order quantity | 5 – 500 pcs |
| Standard lead time | 3 weeks |
| Documents | CMM report, mill certificate, coating certificate |
Process flow
- Mill cert check
- 5-axis milling & gun drilling
- Internal deburring
- Electropolishing
- Borescope & CMM
- Double clean-room bagging
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