
01 / SEMICONDUCTOR
Semiconductor Equipment
Vacuum chambers, gas manifolds and wafer handling parts for etch, deposition and cleaning tools, delivered leak-tested and clean-packed.
- Materials
- A6061-T6, SUS316L, PEEK
- Tolerance
- ±0.01 mm, flatness 0.005
- Inspection
- CMM, helium leak, borescope
- Delivery
- Clean washed, double bagged



